Mitsubishi Polyester Film GmbH

HOSTAPHAN™ polyester films for photoresist processes

In microelectronics, the photoresist process has become established for the production of conductor tracks. Here, a photopolymer in the resist of the photoresist film is exposed to UV radiation in the range of 340 to 420 nm, which triggers a radical polymerisation (negative resist). The unexposed areas are then loosened and removed. In this process, the UV-cured resist serves as a mask for the conductor track.
Atmospheric oxygen can hinder radical polymerisation by peroxide radicals, making the photoresist unstable. HOSTAPHAN™ prevents this by acting as a barrier and allowing UV rays to pass unhindered through the boPET film.

Properties

Our HOSTAPHAN™ films offer the following positive properties in the photoresist sector:
  • High barrier against atmospheric oxygen
  • Good transparency and UV permeability
  • Excellent mechanical strength
  • Good chemical resistance
  • Excellent thermal resistance

Contacts

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For detailed technical information, please contact us.
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